SECM_SYSTEM_REQUIREMENTS_-_YEAR_1.DOCX

Published: 08/23/2018

Description

Scanning Electrochemical Microscope System Requirements ? Requirements for SECM Positioning system: ? 110 mm scanning range on every axis (x,y,z) ? 10 mm/s scanning speed ? Axis resolution (x,y,z) is 20 nm ? Each axis has a built-in closed loop posi...

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