N0017811Q2408MICROMANIPULATOR11Q2408ATTACH.DOC.DOC

Published: 02/24/2011

Description

MINIMUM REQUIREMENTS FOR PROBE STATION QUANTITY 1 Manual adjustment probe station for a 200 mm chuck Coaxial Thermal Chuck Stage seal to reduce/prevent condensation ii. Electrical isolation in excess of 5x10to the ninth at 500VDC minimum **NOTE: ther...

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