ATTACHMENT (D) SR-FE-STG-1207 REV. C.PDF

Published: 04/17/2023

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SCALE 1 : 2 TOP ISOMETRIC VIEW SCALE 1 : 1.5 BOTTOM ISOMETRIC VIEW SCALE 1 : 1.5 VIEW F-F B B F F G G H H L L A B C D 1 2 STORAGE RING FRONT END, STAGE PLATE, Y AXIS TRAVEL, X-Y STAGE SR-FE-STG-1207 C DRAWING/PART NUMBER REVISION ...

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