UHV_XPS_RFQ_DRAWINGS

Published: 06/30/2014

Description

4 3 2 1 Deposition System Plasma Chamber B B CF6 center elevation 54.50 DRAWN CHECKED QA MFG APPROVED Load Lock and sample interchange 12/6/2012 A A TITLE NIST Sample Manipulation System SIZE DWG NO B SCALE SHEET 1 CF6 connection point for analytical...

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