SPECIFICATION_DOCUMENT_19FEB16.DOC
Published: 02/22/2016
Description
Salient Characteristics: Physical Vapor Deposition Plasma Sputtering System PROCESS CHAMBER: D-shaped 304 SS (stainless steel) Minimum 18� wide x 18� deep x 20� high O-ring sealed Hinged lid Aluminum front access door Viewport with shutter and ...
