OXYGEN_PLASMA_ETCHER_SPECIFICATIONS_TO_MEET_OR_EXCEED.PDF

Published: 04/29/2016

Description

Oxygen Plasma Etcher Specifications to Meet or Exceed: ï‚· ï‚· ï‚· ï‚· Dry scroll pump (oil pump not acceptable). Can pump chamber down to 100mTorr. Digital mass flow controller (MFC). Readout in sccm. Range 0-100 sccm Oxygen Option of adding a secon...

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