NNM16586362Q_SPECIFICATIONS.DOCX
Published: 05/16/2016
Description
SPECIFICATIONS Model M-VP-5ZA Travel Range 4.8 mm Minimum Incremental Motion, Linear 0.06 µm Uni-directional Repeatability, Guaranteed 0.3 µm On-Axis Accuracy, Guaranteed 3 or ± 1.5 µm Maximum Speed 5 mm/s Roll 100 or ± 50 µrad Normal Load Capa...
