NRL_CVD_SPECS_-_REVISED.DOCX

Published: 05/17/2016

Description

The Naval Research Laboratory (NRL) requires a metal-organic chemical vapor deposition system (MOCVD) for the growth of single- to few-monolayer transition metal dichalcogenides and their heterostructures, such as MX2 (M = Mo, W; X = S, Se) and other...

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