RFQ__NNG17619050Q_Q&A.PDF

Published: 05/18/2017

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RFQ# NNG17619050Q Q&A 1. Pinhole-Free SiO2 Deposition: Would the deposition be done on a flat surface of a Si wafer, or on some structure? If latter, is conformal (step) coverage or gap fill required? What is the aspect ratio of the structure? ...

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